Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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04/21/2009
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Application #:
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11169305
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Filing Dt:
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06/29/2005
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Publication #:
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Pub Dt:
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01/04/2007
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Inventors:
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Bernardus Antonius Johannes Luttikhuis, Petrus Rutgerus Bartray, Thijs Harink et al
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Title:
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LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD UTILIZING MOVEMENT OF CLEAN AIR TO REDUCE CONTAMINATION
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Assignment:
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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DE RUN 6501 |
VELDHOVEN, NETHERLANDS NL - 5504 DR |
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STERNE, KESSLER, GOLDSTEIN & FOX P.L.L.C |
1100 NEW YORK AVE., NW |
WASHINGTON, DC 20005 |
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