Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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04/21/2009
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Application #:
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11394591
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Filing Dt:
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03/30/2006
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Publication #:
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Pub Dt:
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10/04/2007
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Inventors:
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Li Wu, Elina Szeto, Michael Kwon
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Title:
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OPTICAL METROLOGY OF MULTIPLE PATTERNED LAYERS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| TBS BROADCAST CENTER 3-6 AKASAKA 5-CHOME MINATO-KU |
| TOKYO, JAPAN 107 |
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| PETER J. YIM |
| MORRISON & FOERSTER LLP |
| 425 MARKET STREET |
| SAN FRANCISCO, CA 94105 |
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