Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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05/12/2009
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Application #:
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11225891
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Filing Dt:
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09/14/2005
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Publication #:
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Pub Dt:
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03/15/2007
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Inventor:
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Akiteru Ko
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Title:
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PROCESS AND SYSTEM FOR ETCHING DOPED SILICON USING SF6-BASED CHEMISTRY
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3-6, AKASAKA 5-CHOME |
| TOKYO 107-8481, JAPAN |
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| DLA PIPER RUDNICK GRAY CARY US LLP |
| P.O. BOX 9271 |
| RESTON, VA 20195 |
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