Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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06/09/2009
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Application #:
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11124000
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Filing Dt:
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05/06/2005
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Publication #:
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Pub Dt:
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12/08/2005
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Inventors:
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Takeshi Miyachi, Akira Miyake
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Title:
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EVALUATION METHOD AND FABRICATION METHOD OF OPTICAL ELEMENT HAVING MULTILAYER FILM, EXPOSURE APPARATUS HAVING THE MULTILAYER FILM, AND DEVICE FABRICATION METHOD
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3-30-2, SHIMOMARUKO |
| OHTA-KU |
| TOKYO, JAPAN |
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| MORGAN & FINNEGAN, LLP |
| 3 WORLD FINANCIAL CENTER |
| NEW YORK, NY 10281-2101 |
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