Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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07/07/2009
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Application #:
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11250119
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Filing Dt:
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10/12/2005
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Inventors:
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Michael E. Adel, Moshe Preil, Kevin Monahan, Christopher F. Bevis, Ben Tsai et al
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Title:
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APPARATUS AND METHODS FOR OPTICALLY MONITORING THE FIDELITY OF PATTERNS PRODUCED BY PHOTOLITOGRAPHIC TOOLS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| ONE TECHNOLOGY DRIVE |
| MILPITAS, CALIFORNIA 95035 |
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| BEYER WEAVER & THOMAS LLP |
| P.O. BOX 70250 |
| OAKLAND, CA 94612-0250 |
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