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Patent Assignment Abstract of Title
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Total Assignments: 2
Patent #:
7570343
Issue Dt:
08/04/2009
Application #:
11285283
Filing Dt:
11/23/2005
Publication #:
20060187430
Pub Dt:
08/24/2006
Inventors:
Aurelian Dodoc, Karl Heinz Schuster, Joerg Mallmann, Wilhelm Ulrich, Juergen Fischer et al
Title:
MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS
Assignment: 1
Reel/Frame:
017861/0161Recorded: 05/04/2006Pages: 5
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
DODOC, AURELIAN
Exec Dt:
03/14/2006
SCHUSTER, KARL HEINZ
Exec Dt:
02/09/2006
MALLMANN, JOERG
Exec Dt:
02/28/2006
ULRICH, WILHELM
Exec Dt:
02/14/2006
ROSTALSKI, HANS-JUERGEN
Exec Dt:
02/15/2006
HOLDERER, HUBERT
Exec Dt:
02/09/2006
GELLRICH, BERNHARD
Exec Dt:
02/14/2006
FISCHER, JUERGEN
Exec Dt:
03/30/2006
BEDER, SUSANNE
Exec Dt:
02/10/2006
WURMBRAND, ANDREAS
Exec Dt:
02/14/2006
LOERING, ULRICH
Exec Dt:
02/20/2006
RANCK, ALBRECHT
Exec Dt:
02/13/2006
Assignee:
CARL ZEISS SMT AG
CARL-ZEISS-STRASSE 22
73447 OBERKOCHEN, GERMANY
Correspondent:
SUGHRUE MION, PLLC
2100 PENNSYLVANIA AVENUE, N.W.
SUITE 800
WASHINGTON, DC 20037
Assignment: 2
Reel/Frame:
025763/0367Recorded: 01/18/2011Pages: 28
Conveyance:
A MODIFYING CONVERSION
Assignor:
CARL ZEISS SMT AG
Exec Dt:
10/14/2010
Assignee:
CARL ZEISS SMT GMBH
RUDOLF-EBER-STRASSE 2
73447 OBERKOCHEN, GERMANY
Correspondent:
TIMOTHY A. FRENCH
FISH & RICHARDSON P.C.
ONE MARINA PARK DRIVE
BOSTON, MASSACHUSETTS 02210-1878

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