Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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08/11/2009
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Application #:
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11670728
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Filing Dt:
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02/02/2007
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Publication #:
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Pub Dt:
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08/07/2008
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Inventors:
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ROBERT CHEN, Canfeng Lai, Xinglong Chen, Weiyi Luo, Ellie Y. Yieh, Zhong Qiang Hua et al
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Title:
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INTERNAL BALANCED COIL FOR INDUCTIVELY COUPLED HIGH DENSITY PLASMA PROCESSING CHAMBER
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| P.O. BOX 450A |
| LEGAL AFFAIRS DEPT. |
| SANTA CLARA, CALIFORNIA 95052 |
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| ROBERT W. MULCAHY |
| P.O. BOX 450A |
| LEGAL AFFAIRS DEPT. |
| SANTA CLARA, CA 95052 |
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