Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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08/25/2009
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Application #:
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10923309
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Filing Dt:
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08/19/2004
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Publication #:
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Pub Dt:
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02/24/2005
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Inventor:
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Hiromi Ohtsuka
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Title:
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CLEANING AND DRYING APPARATUS FOR SUBSTRATE HOLDER CHUCK AND METHOD THEREOF
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3-6, AKASAKA 5-CHOME, MINATO-KU |
| TOKYO-TO, JAPAN |
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| MORRISON & FOERSTER LLP |
| DAVID L. FEHRMAN |
| 555 WEST FIFTH ST. |
| SUITE 3500 |
| LOS ANGELES, CA 90013-1024 |
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