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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
09/01/2009
Application #:
11594232
Filing Dt:
11/08/2006
Publication #:
Pub Dt:
05/24/2007
Inventors:
Hiroshi Tanaka, Hidetoshi Nakao, Naoki Shindo, Atushi Yamashita, Tsukasa Hirayama et al
Title:
SUBSTRATE DRYING PROCESSING APPARATUS, METHOD, AND PROGRAM RECORDING MEDIUM
Assignment: 1
Reel/Frame:
018986/0689Recorded: 01/26/2007Pages: 5
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
01/11/2007
Exec Dt:
12/15/2006
Exec Dt:
01/12/2007
Exec Dt:
01/12/2007
Exec Dt:
01/08/2007
Exec Dt:
12/11/2006
Assignee:
3-6, AKASAKA 5-CHOME, MINATO-KU
TOKYO-TO, JAPAN
Correspondent:
SMITH GAMBRELL & RUSSELL
1850 M STREET, NW
SUITE 800
WASHINGTON, DC 20036

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