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Patent Assignment Abstract of Title

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Total Assignments: 3

Patent #:	7605386	Issue Dt:	10/20/2009	Application #:	11598180	Filing Dt:	11/10/2006
Publication #:	20070146853	Pub Dt:	06/28/2007
Inventors:	Wolfgang Singer, Johannes Wangler, Markus Deguenther, Birgit Kuerz, Christoph Menke
Title:	OPTICAL DEVICE WITH RASTER ELEMENTS, AND ILLUMINATION SYSTEM WITH THE OPTICAL DEVICE

Assignment: 1

Reel/Frame:

019008/0231

Recorded: 03/05/2007

Pages: 6

Conveyance:

ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).

Assignors:

SINGER, WOLFGANG

Exec Dt:

01/30/2006

WANGLER, JOHANNES

Exec Dt:

02/06/2006

DEGUNTHER, MARKUS

Exec Dt:

02/07/2006

KUERZ, BIRGIT

Exec Dt:

02/11/2006

MENKE, CHRISTOPH

Exec Dt:

01/26/2006

Assignee:

CARL ZEISS SMT AG

CARL-ZEISS-STRASSE 22

73447 OBERKOCHEN, GERMANY

Correspondent:

OHLANDT, GREELEY, RUGGIERO & PERLE, LLP

ONE LANDMARK SQUARE, 10TH FLOOR

STAMFORD, CT 06901

Assignment: 2

Reel/Frame:

020577/0025

Recorded: 02/28/2008

Pages: 8

Conveyance:

CORRECTIVE ASSIGNMENT TO CORRECT THE THIRD ASSIGNOR'S LAST NAME FROM DEGUNTHER TO DEGUENTHER AND EXECUTION DATES FOR ALL INVENTORS PREVIOUSLY RECORDED ON REEL 019008 FRAME 0231. ASSIGNOR(S) HEREBY CONFIRMS THE ASSIGNMENT OF ASSIGNOR'S INTEREST.

Assignors:

SINGER, WOLFGANG

Exec Dt:

07/30/2007