Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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11/17/2009
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Application #:
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11111344
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Filing Dt:
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04/22/2005
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Publication #:
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Pub Dt:
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12/29/2005
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Inventors:
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Guizhen Yan, Yong Zhu, Jie Fan, Xuesong Liu, Jian Zhou, Yangyuan Wang
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Title:
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METHOD FOR FABRICATING HIGH ASPECT RATIO MEMS DEVICE WITH INTEGRATED CIRCUIT ON THE SAME SUBSTRATE USING POST-CMOS PROCESS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| INSTITUTE OF MICROELECTRONICS, PEKING UNIVERSITY |
| BEIJING, P.R., CHINA 100871 |
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| EVAN R. WITT |
| MADSON & METCALF |
| GATEWAY TOWER WEST |
| 15 WEST SOUTH TEMPLE, SUITE 900 |
| SALT LAKE CITY, UTAH 84101 |
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