Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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11/24/2009
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Application #:
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11130554
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Filing Dt:
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05/16/2005
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Publication #:
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Pub Dt:
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12/01/2005
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Inventors:
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Ganesh Balasubramanian, Juan Carlos Rocha-Alvarez, Tom K. Cho, Daemian Raj
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Title:
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UNIFORMITY CONTROL FOR LOW FLOW PROCESS AND CHAMBER TO CHAMBER MATCHING
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| P. O. BOX 450A |
| SANTA CLARA, CALIFORNIA 95052 |
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| APPLIED MATERIALS |
| P.O. BOX 450A |
| SANTA CLARA, CA 95052 |
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