Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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Issue Dt:
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12/01/2009
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Application #:
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10860152
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Filing Dt:
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06/04/2004
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Publication #:
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Pub Dt:
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11/04/2004
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Inventors:
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Masanobu Honda, Kazuya Nagaseki, Koichiro Inazawa, Shoichiro Matsuyama et al
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Title:
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PLASMA ETCHING METHOD AND PLASMA ETCHING UNIT
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3-6, AKASAKA 5-CHOME |
| MINATO-KU, TOKYO-TO, JAPAN |
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| 1-1, SHIBAURA 1-CHOME |
| MINATO-KU, TOKYO-TO, JAPAN |
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| SMITH GAMBRELL & RUSSELL, LLP |
| MICHAEL A. MAKUCH |
| 1650 M STREET, NW |
| WASHINGTON, DC 20036 |
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Assignment:
2
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CORRECTIVE ASSIGNMENT TO CORRECT THE SECOND INVENTORS NAME PREVIOUSLY RECORDED ON REEL 015444, FRAME 0889.
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| 3-6, AKASAKA 5-CHOME, MINATO-KU |
| TOKYO-TO, JAPAN |
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| 1-1, SHIBAURA 1-CHOME, MINATO-KU |
| TOKYO-TO, JAPAN |
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| MICHAEL A. MAKUCH |
| SMITH GAMBRELL & RUSSELL, LLP |
| 1850 M ST., NW |
| SUITE 800 |
| WASHINGTON, DC 20036 |
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