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Patent Assignment Abstract of Title
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Total Assignments: 2
Patent #:
7629255
Issue Dt:
12/08/2009
Application #:
11757950
Filing Dt:
06/04/2007
Publication #:
20080296736
Pub Dt:
12/04/2008
Inventors:
Qian Fu, Shenjian Liu, Wonchul Lee, Bryan Pu
Title:
METHOD FOR REDUCING MICROLOADING IN ETCHING HIGH ASPECT RATIO STRUCTURES
Assignment: 1
Reel/Frame:
019377/0635Recorded: 06/04/2007Pages: 3
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
FU, QIAN
Exec Dt:
05/29/2007
LIU, SHENJIAN
Exec Dt:
05/29/2007
LEE, WONCHUL
Exec Dt:
05/29/2007
PU, BRYAN
Exec Dt:
06/04/2007
Assignee:
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY
FREMONT, CALIFORNIA 94538
Correspondent:
BEYER WEAVER LLP
P.O. BOX 70250
OAKLAND, CA 94612-0250
Assignment: 2
Reel/Frame:
019439/0176Recorded: 06/15/2007Pages: 5
Conveyance:
CORRECTIVE ASSIGNMENT TO CORRECT THE ATTONEY DOCKET NUMBER PREVIOUSLY RECORDED ON REEL 019377 FRAME 0635. ASSIGNOR(S) HEREBY CONFIRMS THE ASSIGNMENT DOCUMENT.
Assignors:
FU, QIAN
Exec Dt:
05/29/2007
LIU, SHENJIAN
Exec Dt:
05/29/2007
LEE, WONCHUL
Exec Dt:
05/29/2007
PU, BRYAN
Exec Dt:
06/04/2007
Assignee:
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY
FREMONT, CALIFORNIA 94538
Correspondent:
BEYER WEAVER LLP
P.O. BOX 70250
OAKLAND, CA 94612-0250

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