Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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01/05/2010
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Application #:
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10990002
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Filing Dt:
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11/16/2004
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Publication #:
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Pub Dt:
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02/09/2006
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Inventors:
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Nitin K. Ingle, Zheng Yuan, Vikash Banthia, Xinyun Xia, Rong Pan, Hali J.L. Forstner
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Title:
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MULTI-STEP ANNEAL OF THIN FILMS FOR FILM DENSIFICATION AND IMPROVED GAP-FILL
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| P.O. BOX 450A |
| SANTA CLARA, CALIFORNIA 95052 |
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| PATENT COUNSEL |
| APPLIED MATERIALS, INC. |
| P.O. BOX 450A, M/S 2061 |
| LEGAL AFFAIRS DEPARTMENT |
| SANTA CLARA, CA 95052 |
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