Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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01/19/2010
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Application #:
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11467842
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Filing Dt:
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08/28/2006
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Publication #:
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Pub Dt:
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12/28/2006
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Inventors:
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Elizabeth G. Pavel, Mark N. Kawaguchi, James S. Papanu
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Title:
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METHOD AND APPARATUS FOR PERFORMING HYDROGEN OPTICAL EMISSION ENDPOINT DETECTION FOR PHOTORESIST STRIP AND RESIDUE REMOVAL
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3050 BOWERS AVENUE |
| SANTA CLARA, CALIFORNIA 95054 |
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| ALAN TABOADA, ESQ. |
| MOSER IP LAW GROUP |
| 1040 BROAD STREET, 2ND FLOOR |
| SHREWSBURY, NEW JERSEY 07702 |
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