Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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02/02/2010
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Application #:
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11773197
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Filing Dt:
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07/03/2007
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Publication #:
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Pub Dt:
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08/20/2009
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Inventors:
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David Y. Pui, Yi Liu, Christof Asbach, Heinz Fissan
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Title:
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REAL-TIME MONITORING OF PARTICLES IN SEMICONDUCTOR VACUUM ENVIRONMENT
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 1000 WESTGATE DRIVE, SUITE 160 |
| ST. PAUL, MINNESOTA 55114 |
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| BRIAN KAUL |
| 900 SECOND AVENUE SOUTH, SUITE 1400 |
| MINNEAPOLIS, MN 55402 |
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