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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
02/09/2010
Application #:
10772893
Filing Dt:
02/04/2004
Publication #:
Pub Dt:
12/09/2004
Inventors:
Pravin K. Narwankar, Gary Miner, Arnaud Lepert
Title:
TAILORING NITROGEN PROFILE IN SILICON OXYNITRIDE USING RAPID THERMAL ANNEALING WITH AMMONIA UNDER ULTRA-LOW PRESSURE
Assignment: 1
Reel/Frame:
014764/0529Recorded: 06/22/2004Pages: 5
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
06/11/2004
Exec Dt:
06/11/2004
Exec Dt:
06/18/2004
Assignee:
P.O. BOX 450-A
LEGAL AFFAIRS DEPARTMENT
SANTA CLARA, CALIFORNIA 95052
Correspondent:
APPLIED MATERIALS, INC.
ROBERT W. MULCAHY
PATENT COUNSEL LEGAL AFFAIRS DEPT.
P.O. BOX 450-A
SANTA CLARA, CALIFORNIA 95052

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