Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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03/16/2010
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Application #:
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10615794
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Filing Dt:
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07/10/2003
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Publication #:
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Pub Dt:
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01/13/2005
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Inventors:
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Panayotis Andricacos, Dean S. Chung, James E. Fluegel, Keith T. Kwietniak et al
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Title:
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VOID-FREE DAMASCENE COPPER DEPOSITION PROCESS AND MEANS OF MONITORING THEREOF
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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NEW ORCHARD ROAD |
ARMONK, NEW YORK 10504 |
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CONNOLLY BOVE LODGE & HUTZ LLP |
JOHN A. EVANS |
1990 M STREET, N.W., SUITE 800 |
WASHINGTON, DC 20036-3425 |
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