Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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03/16/2010
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Application #:
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11687002
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Filing Dt:
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03/16/2007
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Publication #:
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Pub Dt:
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09/27/2007
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Inventors:
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Hiromasa Yamanashi, Muneyuki Fukuda, Sayaka Tanimoto, Yasunari Sohda
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Title:
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METROLOGY SYSTEM OF FINE PATTERN FOR PROCESS CONTROL BY CHARGED PARTICLE BEAM
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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1-24-14, NISHI SHINBASHI, MINATO-KU |
TOKYO, JAPAN |
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ANTONELLI, TERRY, STOUT & KRAUS, LLP |
1300 N. 17TH ST. |
SUITE 1800 |
ARLINGTON, VA 22209 |
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