Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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03/16/2010
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Application #:
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11686871
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Filing Dt:
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03/15/2007
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Publication #:
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Pub Dt:
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03/27/2008
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Inventors:
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Michael E. Adel, John Robinson, Pavel Izikson, Brad Eichelberger, Amir Widmann et al
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Title:
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METHOD AND SYSTEM FOR OPTIMIZING ALIGNMENT PERFORMANCE IN A FLEET OF EXPOSURE TOOLS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| ONE TECHNOLOGY DRIVE |
| MILPITAS, CALIFORNIA 95035 |
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| BEYER WEAVER LLP |
| P.O. BOX 70250 |
| OAKLAND, CA 94612-0250 |
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