Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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03/23/2010
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Application #:
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11817104
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Filing Dt:
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09/05/2007
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Publication #:
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Pub Dt:
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03/05/2009
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Inventors:
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Shuji Moriya, Tsuneyuki Okabe, Hitoshi Kitagawa, Hiroyuki Ebi, Tetsuo Shimizu
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Title:
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SEMICONDUCTOR FABRICATION SYSTEM, AND FLOW RATE CORRECTION METHOD AND PROGRAM FOR SEMICONDUCTOR FABRICATION SYSTEM
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3-6, AKASAKA 5-CHOME, MINATO-KU |
| TOKYO, JAPAN 107-8481 |
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| OBLON, SPIVAK, ET AL. |
| 1940 DUKE STREET |
| ALEXANDRIA, VA 22314 |
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