Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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04/13/2010
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Application #:
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11796211
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Filing Dt:
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04/27/2007
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Publication #:
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Pub Dt:
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10/30/2008
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Inventors:
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Jennifer Y. Sun, Ren-Guan Duan, Jie Yuan, Li Xu, Kenneth S. Collins
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Title:
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METHOD AND APPARATUS WHICH REDUCE THE EROSION RATE OF SURFACES EXPOSED TO HALOGEN-CONTAINING PLASMAS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3050 BOWERS AVENUE |
| SANTA CLARA, CALIFORNIA 95054 |
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| SHIRLEY L. CHURCH, ESQ. |
| P.O. BOX 81146 |
| SAN DIEGO, CA 92138-1146 |
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