Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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04/20/2010
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Application #:
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10803712
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Filing Dt:
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03/18/2004
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Publication #:
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Pub Dt:
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02/17/2005
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Inventors:
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Yee-Chia Yeo, Burn-Jeng Lin, Chenming Hu
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Title:
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IMMERSION FLUID FOR IMMERSION LITHOGRAPHY, AND METHOD OF PERFORMING IMMERSION LITHOGRAPHY
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| NO. 6, LI-HSIN RD. 6 |
| SCIENCE-BASED INDUSTRIAL PARK |
| HSIN-CHU, TAIWAN 300-77 |
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| SLATER & MATSIL, LLP |
| IRA S. MATSIL |
| 17950 PRESTON RD. |
| SUITE 1000 |
| DALLAS, TX 75252-5793 |
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