Patent Assignment Abstract of Title
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Total Assignments:
3
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Patent #:
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Issue Dt:
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04/27/2010
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Application #:
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11840890
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Filing Dt:
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08/17/2007
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Publication #:
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Pub Dt:
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07/24/2008
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Inventors:
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Mario C. Marconi, Przemyslaw W. Wachulak, Carmen S. Menoni, Jorge J. Rocca
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Title:
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NANOMETER-SCALE LITHOGRAPHY USING EXTREME ULTRAVIOLET/SOFT X-RAY LASER INTERFEROMETRY
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 601 S. HOWES |
| 410 UNIVERSITY SERVICES CENTER |
| FORT COLLINS, COLORADO 80521 |
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| SAMUEL M. FREUND |
| 2026 CARIBOU DRIVE, SUITE 201 |
| FORT COLLINS, CO 80525 |
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Assignment:
2
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CONFIRMATORY LICENSE (SEE DOCUMENT FOR DETAILS).
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| 4201 WILSON BLVD |
| ROOM 1265 |
| ARLINGTON, VIRGINIA 22230 |
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| NATIONAL SCIENCE FOUNDATION |
| 4201 WILSON BLVD |
| ROOM 1265 |
| ARLINGTON, VA 22230 |
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Assignment:
3
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CONFIRMATORY LICENSE (SEE DOCUMENT FOR DETAILS).
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| 4201 WILSON BLVD |
| ROOM 1265 |
| ARLINGTON, VIRGINIA 22230 |
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| NATIONAL SCIENCE FOUNDATION |
| 4201 WILSON BLVD |
| ROOM 1265 |
| ARLINGTON, VA 22230 |
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