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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
05/11/2010
Application #:
11345529
Filing Dt:
02/02/2006
Publication #:
Pub Dt:
01/18/2007
Inventors:
Masahiro Fukuda, Taro Yamamoto
Title:
CLEANING APPARATUS, COATING AND DEVELOPING APPARATUS, AND CLEANING METHOD
Assignment: 1
Reel/Frame:
018312/0722Recorded: 09/15/2006Pages: 3
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
08/23/2006
Exec Dt:
08/23/2006
Assignee:
3-6, AKASAKA 5-CHOME, MINATO-KU
TOKYO, JAPAN
Correspondent:
OBLON, SPIVAK, MCCLELLAND, MAIER & ET AL
1940 DUKE STREET
ALEXANDRIA, VA 22314

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