Patent Assignment Abstract of Title
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Total Assignments:
3
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Patent #:
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Issue Dt:
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06/01/2010
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Application #:
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11493679
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Filing Dt:
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07/26/2006
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Inventors:
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Sunil Shanker, Chi-l Lang, Minh Anh Nguyen, Judy H. Huang
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Title:
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H2-BASED PLASMA TREATMENT TO ELIMINATE WITHIN-BATCH AND BATCH-TO-BATCH ETCH DRIFT
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 4000 NORTH FIRST STREET |
| SAN JOSE, CALIFORNIA 95134 |
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| DELIO & PETERSON, LLC |
| JOHN J. TOMASZEWSK |
| 121 WHITNEY AVENUE |
| NEW HAVEN, CT 06510 |
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Assignment:
2
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 4000 NORTH FIRST STREET |
| SAN JOSE, CALIFORNIA 95134 |
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| DELIO & PETERSON, LLC |
| 121 WHITNEY AVENUE |
| NEW HAVEN, CT 06510-1241 |
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Assignment:
3
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 4000 NORTH FIRST STREET |
| SAN JOSE, CALIFORNIA 95134 |
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| DELIO & PETERSON, LLC |
| 121 WHITNEY AVENUE |
| NEW HAVEN, CT 06510-1241 |
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