Patent Assignment Abstract of Title
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Total Assignments:
3
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Patent #:
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Issue Dt:
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06/08/2010
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Application #:
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11705954
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Filing Dt:
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02/13/2007
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Publication #:
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Pub Dt:
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08/16/2007
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Inventors:
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Alexander I. Ershov, William F. Marx, Norbert Bowering, Bjorn A. M. Hansson et al
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Title:
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SYSTEMS AND METHODS FOR REDUCING THE INFLUENCE OF PLASMA-GENERATED DEBRIS ON THE INTERNAL COMPONENTS OF AN EUV LIGHT SOURCE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 17075 THORNMINT COURT |
| LEGAL DEPT. MS/4-2C |
| SAN DIEGO, CALIFORNIA 92127 |
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| WILLIAM C. CRAY |
| 17075 THORNMINT COURT |
| LEGAL DEPT. MS/4-2C |
| SAN DIEGO, CA 92127 |
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Assignment:
2
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MERGER (SEE DOCUMENT FOR DETAILS).
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| 17075 THORNMINT COURT |
| INTELLECTUAL PROP DEPT - MS/4-2D |
| SAN DIEGO, CALIFORNIA 92127 |
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| JEFFREY J BROOKS |
| 17075 THORNMINT COURT |
| INTELLECTUAL PROP DEPT - MS/4-2D |
| SAN DIEGO, CA 92127 |
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Assignment:
3
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| P.O. BOX 324 |
| VELDHOVEN, NETHERLANDS 5500 AH |
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| ASML NETHERLANDS B.V. |
| P.O. BOX 324 |
| VELDHOVEN, 5500 AH NETHERLANDS |
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