Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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Issue Dt:
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07/27/2010
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Application #:
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11855849
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Filing Dt:
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09/14/2007
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Publication #:
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Pub Dt:
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12/25/2008
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Inventors:
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Dirk Heinrich EHM, Hermann Bieg, Hans-Juergen Mann, Stephan Muellender et al
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Title:
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OPTICAL SYSTEM FOR RADIATION IN THE EUV-WAVELENGTH RANGE AND METHOD FOR MEASURING A CONTAMINATION STATUS OF EUV-REFLECTIVE ELEMENTS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| RUDOLF-EBER-STRASSE 2 |
| OBERKOCHEN, GERMANY 73447 |
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| DE RUN 6507 |
| VELDHOVEN, NETHERLANDS 5504DR |
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| SUGHRUE MION, PLLC |
| 2100 PENNSYLVANIA AVENUE, N.W. |
| SUITE 600 |
| WASHINGTON, DC 20037 |
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Assignment:
2
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| RUDOLF-EBER-STRASSE 2 |
| 73447 OBERKOCHEN, GERMANY |
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| TIMOTHY A. FRENCH |
| FISH & RICHARDSON P.C. |
| ONE MARINA PARK DRIVE |
| BOSTON, MASSACHUSETTS 02210-1878 |
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