Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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10/12/2010
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Application #:
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11974502
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Filing Dt:
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10/11/2007
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Publication #:
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Pub Dt:
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04/16/2009
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Inventors:
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Steven C. Shannon, Michael G. Chafin, Dennis S. Grimard
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Title:
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TIME-BASED WAFER DE-CHUCKING FROM AN ELECTROSTATIC CHUCK HAVING SEPARATE RF BIAS AND DC CHUCKING ELECTRODES
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3050 BOWERS AVENUE |
| SANTA CLARA, CALIFORNIA 95054 |
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| APPLIED MATERIALS, INC. |
| P. O. BOX 450 A |
| SANTA CLARA, CA 95052 |
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