Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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Issue Dt:
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11/09/2010
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Application #:
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11849978
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Filing Dt:
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09/04/2007
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Publication #:
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Pub Dt:
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03/05/2009
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Inventor:
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Harald Herchen
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Title:
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METHOD AND SYSTEM FOR CONTROLLING BAKE PLATE TEMPERATURE IN A SEMICONDUCTOR PROCESSING CHAMBER
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| K-I SHIJO BUILDING, 88 KANKOBOKO-CHO |
| SHIJODORI-MUROMACHI-HIGASHIIRU, SHIMOGYO-KU |
| KYOTO, JAPAN 600-8009 |
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| CRAIG C. LARGENT |
| TWO EMBARCADERO CENTER, 8TH FLOOR |
| SAN FRANCISCO, CA 94111 |
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Assignment:
2
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CHANGE OF NAME (SEE DOCUMENT FOR DETAILS).
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| (FORMERLY OF: 88 KANKOBOKO-CHO, SHIJODORI-MUROMACHI-HIGASHIIRU, SHIMOGYO-KU, KYOTO, JAPAN) |
| TENJINKITA-MACHI 1-1, TERANOUCHI-AGARU 4-CHOME, HORIKAWA-DORI |
| KAMIGYO-KU, KYOTO, JAPAN |
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| SUGHRUE MION, PLLC |
| 2100 PENNSYLVANIA AVE. NW |
| SUITE 800 |
| WASHINGTON, DC 20037-3213 |
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