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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
11/16/2010
Application #:
11533889
Filing Dt:
09/21/2006
Publication #:
Pub Dt:
03/22/2007
Inventors:
Naoyuki Wada, Hiroyuki Kishi
Title:
TEMPERATURE CONTROL METHOD OF EPITAXIAL GROWTH APPARATUS
Assignment: 1
Reel/Frame:
018284/0450Recorded: 09/21/2006Pages: 3
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
08/17/2006
Exec Dt:
08/16/2006
Assignee:
2-1, SHIBAURA 1-CHOME
MINATO-KU, TOKYO, JAPAN
Correspondent:
JULES E. GOLDBERG, REED SMITH LLP
599 LEXINGTON AVENUE, 29TH FLOOR
N. MASSPEQUA, NY 10022

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