Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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11/23/2010
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Application #:
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11994763
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Filing Dt:
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08/20/2008
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Publication #:
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Pub Dt:
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05/14/2009
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Inventors:
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Peter Rosenthal, Carlos A. Duran, Alexei Maznev, Alexander Mazurenko
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Title:
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METHOD OF MEASURING DEEP TRENCHES WITH MODEL-BASED OPTICAL SPECTROSCOPY
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 12 MICHIGAN DRIVE |
| NATICK, MASSACHUSETTS 01760 |
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| GOODWIN PROCTER LLP ATTN: PATENT ADMIN |
| EXCHANGE PLACE, 53 STATE STREET |
| BOSTON, MA 02109 |
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