Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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12/07/2010
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Application #:
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11861032
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Filing Dt:
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09/25/2007
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Publication #:
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Pub Dt:
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03/26/2009
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Inventors:
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Kallol BERA, Kenny L. DOAN, Subhash DESHMUKH, Stephan WEGE
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Title:
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METHOD OF PREVENTING ETCH PROFILE BENDING AND BOWING IN HIGH ASPECT RATIO OPENINGS BY TREATING A POLYMER FORMED ON THE OPENING SIDEWALLS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| P.O. BOX 450A |
| LEGAL AFFAIRS DEPT. |
| SANTA CLARA, CALIFORNIA 95052 |
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| ROBERT W. MULCAHY |
| P.O. BOX 450A |
| LEGAL AFFAIRS DEPT. |
| SANTA CLARA, CA 95052 |
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