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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
01/18/2011
Application #:
11966185
Filing Dt:
12/28/2007
Publication #:
Pub Dt:
08/14/2008
Inventors:
Gyu Dong CHO, Ho Jin CHO, Hyun Jung KIM
Title:
METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE USING A FREE RADICAL ASSISTED CHEMICAL VAPOR DEPOSITION NITIRIFYING PROCESS
Assignment: 1
Reel/Frame:
020635/0915Recorded: 03/12/2008Pages: 3
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
12/26/2007
Exec Dt:
12/26/2007
Exec Dt:
12/26/2007
Assignee:
SAN 136-1, AMI-RI, BUBAL-EUB, ICHEON-SI
KYOUNGKI-DO, KOREA, REPUBLIC OF
Correspondent:
RICHARD J. STREIT
LADAS & PARRY, 224 SOUTH MICHIGAN AVE.
CHICAGO, IL 60604

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