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Patent Assignment Abstract of Title
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Total Assignments: 5
Patent #:
Issue Dt:
02/01/2011
Application #:
10565486
Filing Dt:
05/04/2006
Publication #:
Pub Dt:
02/08/2007
PCT #:
US0423490
Inventors:
Bipin S. Parekh, Jeffrey J. Spiegelman, Robert S. Zeller, Russell J. Holmes
Title:
LITHOGRAPHIC PROJECTION APPARATUS, PURGE GAS SUPPLY SYSTEM AND GAS PURGING METHOD
Assignment: 1
Reel/Frame:
015332/0606Recorded: 11/03/2004Pages: 5
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
08/06/2004
Exec Dt:
10/26/2004
Exec Dt:
08/06/2004
Exec Dt:
10/07/2004
Assignee:
129 CONCORD ROAD
BILLERICA, MASSACHUSETTS 01821
Correspondent:
HAMILTON BROOK SMITH, ET AL.
ALICE O. CARROLL, ESQ.
530 VIRGINIA ROAD
P.O. BOX 9133
CONCORD, MA 01742-9133
Assignment: 2
Reel/Frame:
018026/0873Recorded: 07/28/2006Pages: 8
Conveyance:
MERGER (SEE DOCUMENT FOR DETAILS).
Assignor:
Exec Dt:
08/05/2005
Assignee:
3500 LYMAN BOULEVARD
CHASKA, MINNESOTA 55318
Correspondent:
TIMOTHY J. KING
129 CONCORD ROAD
ENTEGRIS, INC.
BILLERICA, MA 01821-4600
Assignment: 3
Reel/Frame:
017582/0728Recorded: 05/04/2006Pages: 17
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
03/02/2006
Exec Dt:
04/03/2006
Exec Dt:
04/10/2006
Exec Dt:
04/03/2006
Assignee:
3500 LYMAN BOULEVARD
CHASKA, MINNESOTA 55318
Correspondent:
ALICE O. CARROLL, ESQ.
HAMILTON, BROOK, SMITH & REYNOLDS, P.C.
530 VIRGINIA ROAD, P.O. BOX 9133
CONCORD, MA 01742-9133
Assignment: 4
Reel/Frame:
022354/0784Recorded: 03/09/2009Pages: 43
Conveyance:
SECURITY AGREEMENT
Assignor:
Exec Dt:
03/02/2009
Assignee:
90 SO. 7TH STREET
19TH FLOOR
MINNEAPOLIS, MINNESOTA 55479
Correspondent:
SARAH WITHERS
3290 NORTHSIDE PARKWAY
SUITE 400
ATLANTA, GA 30327
Assignment: 5
Reel/Frame:
026764/0880Recorded: 08/17/2011Pages: 46
Conveyance:
RELEASE BY SECURED PARTY (SEE DOCUMENT FOR DETAILS).
Assignor:
Exec Dt:
06/09/2011
Assignee:
129 CONCORD ROAD
BILLERICA, MASSACHUSETTS 01821-4600
Correspondent:
TIMOTHY J. KING
129 CONCORD ROAD
ENTEGRIS, INC.
BILLERICA, MA 01821-4600

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