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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
02/08/2011
Application #:
11689065
Filing Dt:
03/21/2007
Publication #:
Pub Dt:
09/27/2007
Inventors:
Masanobu HONDA, Yutaka Matsui, Manabu Sato
Title:
PLASMA PROCESSING METHOD
Assignment: 1
Reel/Frame:
019401/0967Recorded: 06/08/2007Pages: 3
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
05/11/2007
Exec Dt:
05/18/2007
Exec Dt:
05/18/2007
Assignee:
3-6, AKASAKA 5-CHOME, MINATO-KU
TOKYO, JAPAN 107-8481
Correspondent:
OBLON, SPIVAK, ET AL.
1940 DUKE STREET
ALEXANDRIA, VA 22314

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