Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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Issue Dt:
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02/15/2011
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Application #:
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11430917
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Filing Dt:
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05/10/2006
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Publication #:
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Pub Dt:
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01/18/2007
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Inventors:
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Eizo Ohya, Kyoji Nakamura, Yasushi Mizuno
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Title:
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VARIABLE SLIT APPARATUS, ILLUMINATION APPARATUS, EXPOSURE APPARATUS, EXPOSURE METHOD, AND DEVICE FABRICATION METHOD
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 2-3, MARUNOUCHI 3-CHOME |
| CHIYODA-KU, TOKYO, JAPAN |
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| MARIO A. COSTANTINO |
| OLIFF & BERRIDGE, PLC |
| P.O. BOX 19928 |
| ALEXANDRIA, VA 22320 |
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Assignment:
2
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RECORD TO CORRECT THE TITLE ON AN ASSIGNMENT DOCUMENT PREVIOUSLY RECORDED AT REEL 018277 FRAME 0938.
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| 2-3, MARUNOUCHI 3-CHOME |
| CHIYODA-KU, TOKYO, JAPAN |
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| JAMES A. OLIFF |
| OLIFF & BERRIDGE, PLC |
| P.O.B OX 19928 |
| ALEXANDRIA, VA 22320 |
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