Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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02/22/2011
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Application #:
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11422826
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Filing Dt:
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06/07/2006
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Publication #:
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Pub Dt:
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09/28/2006
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Inventors:
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HUA CHUNG, LING CHEN, BARRY L. CHIN
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Title:
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CYCLICAL DEPOSITION OF REFRACTORY METAL SILICON NITRIDE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| P.O. BOX 450-A |
| PATENT COUNSEL |
| SANTA CLARA, CALIFORNIA 95052 |
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| PATTERSON & SHERIDAN, L.L.P. |
| APPLIED MATERIALS, INC. |
| 3040 POST OAK BOULEVARD, SUITE 1500 |
| HOUSTON, TX 77056 |
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