Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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03/01/2011
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Application #:
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11311623
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Filing Dt:
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12/20/2005
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Publication #:
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Pub Dt:
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06/21/2007
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Inventors:
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Vadim Yevgenyevich Banine, Levinus Pieter Bakker, Ralph Kurt et al
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Title:
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SYSTEM AND METHOD FOR DETECTING AT LEAST ONE CONTAMINATION SPECIES IN A LITHOGRAPHIC APPARATUS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| DE RUN 6501, NL-5504 DR |
| VELDHOVEN, NETHERLANDS |
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| PILLSBURY WINTHROP SHAW ET AL |
| P.O. BOX 10500 |
| 1650 TYSONS BOULEVARD |
| MCLEAN, VA 22102 |
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