Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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03/15/2011
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Application #:
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11902782
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Filing Dt:
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09/25/2007
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Publication #:
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Pub Dt:
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04/03/2008
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Inventors:
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Kazuhide Hasebe, Yoshihiro Ishida, Takehiko Fujita, Jun Ogawa, Shigeru Nakajima
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Title:
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FILM FORMATION METHOD AND APPARATUS FOR FORMING SILICON OXIDE FILM
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3-6, AKASAKA 5-CHOME |
| MINATO-KU, TOKYO 107-8481, JAPAN |
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| SMITH GAMBRELL & RUSSELL |
| 1130 CONNECTICUT AVENUE, NW |
| SUITE 1130 |
| WASHINGTON, DC 20036 |
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