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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
03/22/2011
Application #:
11440561
Filing Dt:
05/24/2006
Publication #:
Pub Dt:
03/29/2007
Inventors:
Yunsang Kim, Andrew D. Bailey III
Title:
APPARATUS AND METHODS TO REMOVE FILMS ON BEVEL EDGE AND BACKSIDE OF WAFER
Assignment: 1
Reel/Frame:
022679/0029Recorded: 05/13/2009Pages: 2
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
05/25/2006
Exec Dt:
05/25/2006
Assignee:
4650 CUSHING PARKWAY
FREMONT, CALIFORNIA 94538
Correspondent:
LIE-YEA CHENG
710 LAKEWAY DRIVE
SUITE 200
SUNNYVALE, CA 94085

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