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Patent Assignment Abstract of Title
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Total Assignments: 2
Patent #:
Issue Dt:
03/29/2011
Application #:
11900946
Filing Dt:
09/14/2007
Publication #:
Pub Dt:
03/20/2008
Inventors:
Axel Zibold, Wolfgang Harnisch, Oliver Kienzle
Title:
METHOD AND ARRANGEMENT FOR REPAIRING PHOTOLITHOGRAPHY MASKS
Assignment: 1
Reel/Frame:
020093/0024Recorded: 11/09/2007Pages: 4
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
08/02/2007
Exec Dt:
08/08/2007
Exec Dt:
08/16/2007
Assignee:
CARL-ZEISS-PROMENADE 10
JENA, GERMANY 07745
Correspondent:
DOUGLAS J. CHRISTENSEN
80 SOUTH 8TH STREET
4800 IDS CENTER
MINNEAPOLIS, MN 55402
Assignment: 2
Reel/Frame:
040069/0705Recorded: 09/19/2016Pages: 7
Conveyance:
MERGER (SEE DOCUMENT FOR DETAILS).
Assignor:
Exec Dt:
05/12/2015
Assignee:
RUDOLF-EBER-STRASSE 2
OBERKOCHEN, GERMANY 73447
Correspondent:
MARC WEFERS
FISH & RICHARDSON P.C.
P.O.BOX 1022
MINNEAPOLIS, MN 55440-1022

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