Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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04/19/2011
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Application #:
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11525368
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Filing Dt:
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09/22/2006
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Publication #:
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Pub Dt:
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02/15/2007
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Inventors:
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Mihai Ganciu-Petcu, Michel Hecq, Jean-Pierre Dauchot, Michel Touzeau et al
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Title:
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PULSED MAGNETRON SPUTTERING DEPOSITION WITH PREIONIZATION
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| PARC INITIALIS, AVENUE NICOLAS COPERNIC 1 |
| MONS, BELGIUM B-7000 |
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| 1 PLACE ARISTIDE-BRIAND |
| MEUDON, FRANCE F-92195 |
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| 15 AVENUE G. CLEMENCEAU |
| ORSAY CEDEX, FRANCE F-91405 |
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| ANDREW J. HEINISCH |
| REINHART BOERNER VAN DEUREN P.C. |
| 2215 PERRYGREEN WAY |
| ROCKFORD, IL 61107 |
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