Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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04/19/2011
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Application #:
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10594895
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Filing Dt:
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11/07/2006
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Publication #:
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Pub Dt:
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10/30/2008
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Inventors:
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Tadahiro Ohmi, Akinobu Teramoto, Hiroshi Yamauchi, Yukio Hayakawa
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Title:
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PLASMA PROCESSING METHOD AND METHOD FOR MANUFACTURING AN ELECTRONIC DEVICE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 586-9, AZA USHIGAFUCHI, AKATSUKA |
| TSUKUBA-SHI, IBARAKI 305-0062, JAPAN |
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| GEORGE C. BECK |
| FOLEY & LARDNER LLP |
| WASHINGTON HARBOUR |
| 3000 K STREET NW, SUITE 500 |
| WASHINGTON, DC 20007-5143 |
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