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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
04/26/2011
Application #:
10362973
Filing Dt:
03/06/2003
Publication #:
Pub Dt:
01/22/2004
Inventors:
Masataka Hirose, Shinjo Nakamura, Hirokazu Aoyama, Mitsushi Itano
Title:
DRY ETCHING GAS AND METHOD FOR DRY ETCHING
Assignment: 1
Reel/Frame:
014252/0536Recorded: 03/06/2003Pages: 3
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
02/18/2003
Exec Dt:
02/18/2003
Exec Dt:
02/18/2003
Exec Dt:
02/18/2003
Assignee:
4-12, NAKAZAKI-NISHI 2-CHOME, KITA-KU, OSAKA-SHI
UMEDA CENTER BUILDING
OSAKA 530-8323, JAPAN
Correspondent:
ARMSTRONG, WESTERMAN & HATTORI, LLP
STEPHEN G. ADRIAN
1725 K STREET, N.W., SUITE 1000
WASHINGTON, D.C. 20006

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