Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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05/03/2011
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Application #:
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11628138
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Filing Dt:
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11/29/2006
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Publication #:
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Pub Dt:
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01/31/2008
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Inventor:
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Shunji Kuroiwa
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Title:
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SPUTTERING APPARATUS AND METHOD, AND SPUTTERING CONTROL PROGRAM
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 2-5-1, KASAMA, SAKAE-KU, YOKOHAMA-SHI |
| KANAGAWA, JAPAN 247-8610 |
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| JOSEPH W. PRICE |
| SNELL & WILMER LLP |
| 600 ANTON BOULEVARD, SUITE 1400 |
| COSTA MESA, CA 92626 |
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