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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
05/24/2011
Application #:
11907187
Filing Dt:
10/10/2007
Publication #:
Pub Dt:
05/01/2008
Inventors:
Hiroyuki Kanda, Akira Susaki, Satoru Yamamoto, Tsutomu Nakada
Title:
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
Assignment: 1
Reel/Frame:
020281/0705Recorded: 12/17/2007Pages: 3
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
10/15/2007
Exec Dt:
10/15/2007
Exec Dt:
10/15/2007
Exec Dt:
10/15/2007
Assignee:
11-1, HANEDA ASAHI-CHO, OHTA-KU
TOKYO, JAPAN
Correspondent:
WENDEROTH, LIND & PONACK, L.L.P.
ATTN: W. DOUGLAS HAHM, ESQ
2033 K STREET, N.W., SUITE 800
WASHINGTON, D.C. 20006-1021

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