Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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06/07/2011
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Application #:
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12478493
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Filing Dt:
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06/04/2009
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Publication #:
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Pub Dt:
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12/09/2010
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Inventors:
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Chin Kun Lan, Sheng-Wen Chen, Hung Jui Chang, Ying-Lang Wang, Yu-Ku Lin
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Title:
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OXYGEN PLASMA REDUCTION TO ELIMINATE PRECURSOR OVERFLOW IN BPTEOS FILM DEPOSITION
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| NO. 8, LI-HSIN RD. 6, SCIENCE-BASED INDUSTRIAL PARK |
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| TUNG & ASSOCIATES |
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