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Patent Assignment Abstract of Title

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Total Assignments: 1

Patent #:	7959985	Issue Dt:	06/14/2011	Application #:	11378263	Filing Dt:	03/20/2006
Publication #:	20070218683	Pub Dt:	09/20/2007
Inventors:	Tadahiro Ishizaka, Tsukasa Matsuda, Masamichi Hara, Jacques Faguet, Yasushi Mizusawa
Title:	METHOD OF INTEGRATING PEALD TA- CONTAINING FILMS INTO CU METALLIZATION

Assignment: 1

Reel/Frame:

Recorded: 05/30/2006

Pages: 3

Conveyance:

ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).

Assignors:

ISHIZAKA, TADAHIRO

Exec Dt:

03/31/2006

MATSUDA, TSUKASA

Exec Dt:

03/31/2006

HARA, MASAMICHI

Exec Dt:

04/07/2006

FAGUET, JACQUES

Exec Dt:

03/31/2006

MIZUSAWA, YASUSHI

Exec Dt:

04/04/2006

Assignee:

TOKYO ELECTRON LIMITED

3-6, AKASAKA 5-CHOME, MINATO-KU

TOKYO 107-8481, JAPAN

Correspondent:

OBLON, SPIVAK, MCCLELLAND, MAIER & NEUST

1940 DUKE STREET

ALEXANDRIA, VA 22314

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